CALCULATION AND ANALYSIS OF ELECTRON TRANSPORT COEFFICIENTS IN H2 – Kr MIXTURES

Phan Thi Tuoi; Vu Trong Truong; Nguyen Thi Van Anh

Phan Thi Tuoi Hung Yen University of Technology and Education
Vu Trong Truong Hung Yen University of Technology and Education
Nguyen Thi Van Anh Hung Yen University of Technology and Education

Keywords: H2 - Kr mixtures, electron transport coefficient, Boltzmann equation, plasma processing

Abstract

The electron transport coefficients, which include the electron drift velocities, the density-normalized longitudinal diffusion coefficients and the Townsend first ionization coefficients are important data for plasma modelling. These coefficients in H₂and its mixture with Kr, were firstly studied using a Boltzmann two-term calculation. This study was carried out in the E/N (ratio of the electric field E to the neutral number density) range of 0.1-1000 Td (1Td = 10^-17Vcm²). These results are necessary for plasma processing using the H₂ - Kr mixtures.

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