Phan Thi Tuoi, Nguyen Thi Thuy Dung, Phan Bich Ngoc, Pham Thi Ngoc Anh, and Nguyen Thi Huyen Linh. 2023. “CALCULATION AND ANALYSIS OF ELECTRON TRANSPORT COEFFICIENTS IN TEOS- SiH 4 GAS MIXTURES”. UTEHY Journal of Applied Science and Technology 40 (December), 51-55. http://jst.utehy.edu.vn/index.php/jst/article/view/709.