Phan Thi Tuoi, Nguyen Thi Thuy Dung, Phan Bich Ngoc, Pham Thi Ngoc Anh, and Nguyen Thi Huyen Linh. “CALCULATION AND ANALYSIS OF ELECTRON TRANSPORT COEFFICIENTS IN TEOS- SiH 4 GAS MIXTURES”. UTEHY Journal of Applied Science and Technology, Vol. 40, Dec. 2023, pp. 51-55, http://jst.utehy.edu.vn/index.php/jst/article/view/709.