Phan Thi Tuoi, Nguyen Thi Thuy Dung, Phan Bich Ngoc, Pham Thi Ngoc Anh, Nguyen Thi Huyen Linh. CALCULATION AND ANALYSIS OF ELECTRON TRANSPORT COEFFICIENTS IN TEOS- SiH 4 GAS MIXTURES. jst [Internet]. 2023Dec.12 [cited 2024Dec.22];40:51-5. Available from: http://jst.utehy.edu.vn/index.php/jst/article/view/709