CALCULATION ELECTRON TRANSPORT COEFFICIENTS IN CF4-CO2-N2  MIXTURES

Vu Trong Truong; Phan Thi Tuoi; Nguyen Thi Ngoc Chi; Bui Thi Kim Thoa; Nguyen Thi Thuy Dung

Vu Trong Truong Hung Yen University of technology and Education
Phan Thi Tuoi Hung Yen University of Technology and Education
Nguyen Thi Ngoc Chi Hung Yen University of Technology and Education
Bui Thi Kim Thoa Hung Yen University of Technology and Education
Nguyen Thi Thuy Dung Hung Yen University of Technology and Education

Keywords: CF4-CO2-N2 mixtures, electron transport coefficient, Monte Carlo method, plasma processing

Abstract

Electron transport coefficients in CF4–CO2–N2 gas mixtures were calculated using the (MCIG) Monte-Carlo swarm code. The calculations were performed over the reduced electric field range E/N = 10 –1000 Td. The reported quantities include the energy mobility, reduced mobility (μN), mean electron energy, and the electron energy distribution function (EEDF) for mixtures containing 10%, 20%, 30%, and 40% CF4 (with CO2 and N2 in the balance according to the selected mixing ratios). The resulting dataset provides input parameters for plasma modeling and plasma processing applications using CF4–CO2–N2 mixtures.

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