SIMULATIONS OF ARGON GASEOUS ELECTRONICS CONFERENCE INDUCTIVELY COUPLED PLASMA REACTOR USING COMSOL MULTIPHYSICS

  • Pham Thi Tuoi Hung Yen University of Technology and Education
  • Pham Xuan Hien Hung Yen University of Technology and Education
  • Nguyen Thi Van Anh Hung Yen University of Technology and Education
  • Nguyen Thi Thuy Duong Hung Yen University of Technology and Education
  • Nguyen Quang Van Department of Industry and Trade of Hung Yen
Keywords: Inductive coupled plasma, Comsol Multiphysics, electron collision cross section

Abstract

In this study, a model of reactor inductively coupled plasma using Argon (Ar) has been studied using Comsol Multiphysics’s built-in Plasma Module

References

Yamabe, Buckman, and Phelps, Measurement of free-free emission from low-energy-electron collisions with Ar. Phys. Rev, 27, 1983, pp.1345.

PHELPS database, http://www.lxcat.laplace.univ-tlse.fr, retrieved June 4, 2013.

Published
2019-01-06
How to Cite
Pham Thi Tuoi, Pham Xuan Hien, Nguyen Thi Van Anh, Nguyen Thi Thuy Duong, & Nguyen Quang Van. (2019). SIMULATIONS OF ARGON GASEOUS ELECTRONICS CONFERENCE INDUCTIVELY COUPLED PLASMA REACTOR USING COMSOL MULTIPHYSICS. UTEHY Journal of Applied Science and Technology, 20, 28-30. Retrieved from http://jst.utehy.edu.vn/index.php/jst/article/view/57
Issue
Vol. 20 (2018): UTEHY Journal of Science and Technology
Section
Articles