RESEARCH FOR BUILDING A PRESSURE MEASUREMENT SYSTEM  USING MEMS SENSOR

Tran Van Bien; Nguyen Van Dung; Nguyen Ngoc Minh

Tran Van Bien Faculty of Electronic and Electrical Engineering, Hung Yen University of Technology and Education
Nguyen Van Dung Faculty of Electronic and Electrical Engineering, Hung Yen University of Technology and Education
Nguyen Ngoc Minh Faculty of Electronic and Electrical Engineering, Hung Yen University of Technology and Education

Abstract

This paper presents research and design of pressure measurement system. The measuring system includes a MEMS pressure sensor (made at the ITIMS Institute), an A/D module and a Raspberry Pi embedded computer board with touch screen display. The system is studied using pressure sensors made in Vietnam and embedded computers, the measurement results show that the microsensor operates linearly in the pressure range from 0 ÷ 300 mmHg, the sensitivity reaches 0.055 mV/mmHg. This opens up the application possibilities of sensors in the field of industry and medicine, etc.

References

Vu N. Hung, Le V. Minh, Nguyen V. Minh, Chu M. Hoang, Trinh Q. Thong, R. Amarasinge, Dao V. Dung, S. Sugiyama, Design and Fabrication of Miniature Piezoresistive Pressure Sensors Employing Silicon-on-Insulator Substrate. In Proceedings of First International Workshop on Nanotechnology and Application (IWNA 2007), 15-17 November 2007, Vung Tau City, Vietnam.

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