INDENTATION SIZE EFFECT ON THE DEFORMATION BEHAVIOR OF Ta-Cu AMORPHOUS THIN FILMS

Anh-Vu Pham; Trong-Linh Nguyen

Anh-Vu Pham Hung Yen University of Technology and Education
Trong-Linh Nguyen Hung Yen University of Technology and Education

Abstract

Molecular dynamics simulations were conducted to investigate the deformation characteristics of Ta₄₀Cu₆₀ amorphous coatings under nanoindentation. This study provides insights into the influence of indenter size on the deformation mechanisms at the Ta₄₀Cu₆₀ amorphous coating/Cu substrate interface. The results reveal that both the maximum indentation force and the extent of the plastic deformation region increase with increasing indenter diameter.

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